Device catalytic deposition - メーカー・企業と業務用製品 | イプロスものづくり

Catalytic deposition device for carbon nanotube synthesis

Compatible with PLUME series plasma sources! Supports PVD and PECVD processes.

We handle carbon nanotube synthesis equipment and catalyst deposition. The hybrid reactor configuration supports PVD and PECVD processes. Without exposing to the atmosphere, we achieve all steps of CNT and graphene synthesis, including substrate surface cleaning, buffer layer deposition, and catalyst layer synthesis. 【Features】 ■ The MAGNION series magnetron equipment can be equipped with the PLUME series plasma source. ■ The hybrid reactor configuration supports PVD and PECVD processes. *For more details, please refer to the PDF document or feel free to contact us.